UHV sputter deposition system

3” radio-frequency (rf) and DC sputter sources, cryo-pumped chamber with load-lock.

Sputter deposition of thin film oxides

 

Computer equipment

We use the UCSB Materials Research Lab.'s computing facilities, supported by the supported by the MRSEC Program of the National Science
Foundation under Award No. DMR00-80034

 

Computer equipment

 

X-Ray powder diffractometer

The monochromatic Cu Kα1  line is isolated by the Vario onochromater at the X-Ray tube. A Braun position sensitive detector permits up to 8° 2θ of diffracted beam to be measured continuously while scanning, which dramatically increases sensitivity.